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​AIOT Chemical Concentration Management Platform

Applications Semiconductor Grade Related Applications

  • AL etching solution

  • KOH

  • Others

EBON Chemi1.png

This instrument continuously measures the concentration of various acids in etching solution with AIOT edge calculation, combined with hydrometer and titration method.  Through such continuous measurement, control the acid concentration to be the same as the preset value, and use Rule Base, regression control or AI artificial intelligence edge computing to stabilize the etching intelligence, and can predict the consumption of the etching solution in the future, so as to reduce the cost. Purpose. 
This instrument consists of the following parts:
 

  1. AIOT components:  MCU, Sensor Board, PLC and control system.

  2. Reagent Tank : Reagent Tank controls the chemicals used in the measurement

  3. Acid Supplementation Device: Wisdom Yuqi Acid Supplement 

  4. AIOT Operation Control System:  The part of the AIOT human-machine interface is to measure and control the acid composition through the output and input signals, and can be connected to cloud monitoring systems such as AWS. 

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